
100+
Ultra-high-speed Motion Control Software Algorithm
The ultra-high-speed motion control software is based on the combination of H2 and H∞ hybrid control algorithm which keeps the stability, dynamic and steady-state characteristics of the system unchanged under a certain type of uncertainty, thereby effectively improving the multi-level axis linkage motion control efficiency and control accuracy.
Can realize any three-axis linear interpolation, any two-axis circular interpolation, any three-axis helical interpolation and continuous interpolation functions ;
It can achieve the functionality of 12-axis simultaneous motion or 4 groups of 3-axis simultaneous motion interpolation, and the 12-axis motor can be exchanged within the command cycle of 1ms.


Sub-micron Precision Motion Platform
The positioning accuracy of the precision motion platform driven by the linear ultrasonic motor can reach micron level or even nanometer level, and the stroke can reach hundreds of millimeters. The average resolution measured by the experiment can reach 50nm; the maximum working speed is 0.5m/s, and the acceleration is greater than 15m/s. , the positioning accuracy is 100nm, and the stabilization time is less than 10ms. This technology can be applied to precision motion platforms that are widely used in chip testing equipment, lithography scanning control and other related fields.